Mass Sensing Device for Liquid Environment
A device for sensing a mass in a liquid environment including a resonator comprising a piezo layer having a top electrode and a bottom electrode, a sensing surface located adjacent and opposite the top electrode, the resonator and the sensing surface defining a gap therebetween, and a post attached to the sensing surface and the resonator.
Attached files:Patents:WO 2,010,118,154
Inventor(s):
KWON JAE WAN [US]
Type of Offer:
Licensing
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