Nanometer-scale Electromechanical Switch and Fabrication Process

The present invention describes nano-scale fabrication technique used to create a sub-micron wide gap across the center conductor of a coplanar waveguide transmission line configured in a fixed-fixed beam arrangement, resulting in a pair of opposing cantilever beams that comprise an electro-mechanical switch. Accordingly, a nanometer-scale mechanical switch with very high switching speed and low actuation voltage has been developed. This switch is intended primarily for application in the RF/microwave/wireless industry.

Attached files:
US 20100087063.jpg

Patents:
US 20,100,087,063

Inventor(s): WELLER THOMAS [US]; KETTERL THOMAS [US]

Type of Offer: Licensing



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