A Real-Time Optical Sensor System for Monitoring Parylene Thickness ()

Abstract:
With the ever-increasing need for higher accuracy in process controls, NASA Goddard Space Flight Center's (GSFC) new real-time sensor technology greatly improves accuracy in parylene and other polymer deposition systems. This technology also saves time and money through reduced error and material waste. The film thickness accuracy made possible with this sensor also lead GSFC to establish the use of thin film parylene-C as a sacrificial layer in MEMS fabrication. This new application of parylene enables new and advanced technologies for the electronics industry.

Type of Offer: Licensing



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