Mems Microphone Array on a Chip

The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.

Attached files:
2009154981.jpg

Patents:
WO 2,009,154,981

Inventor(s): WHITE ROBERT D [US]; KRAUSE JOSHUA S [US]

Type of Offer: Licensing



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