Nano-microphone Or Pressure Sensor

The invention relates to a method and a device for measuring or detecting and/or generating of pressures or pressure changes, in particular acoustic vibration and a method for production of such a device. The invention particularly relates to a nano-microphone. The device comprises at least one nano-membrane with a support membrane and at least one counter-electrode, the support membrane having at least one monolayer.

Attached files:


Patents:
WO 2,007,147,643

Inventor(s): GOELZHAEUSER ARMIN [DE]

Type of Offer: Sale



« More Acoustical Patents

---