An Imaging Detector for a Scanning Charged Particle Microscope

The present disclosure provides a component for an imaging detector of a scanning charged particle microscope. The scanning changed particle microscope has a column for providing a scanning beam of the charged particles. The imaging detector is arranged for detecting off-axis electrons at a position outside the column and comprises an electron receiving element that is arranged to generate a signal in response to an intensity of received electrons. The detector component also comprises a filter that has a solid screening element and is arranged such that at least a portion of the electrons that have an initial kinetic energy within a first energy range are captured by the screening element and prevented from being received by the electron receiving element and at least a portion of the electrons that have an initial kinetic energy within a second energy range are received by the electron receiving element. The first energy range includes higher energies than the second energy range.

Attached files:


Patents:
WO 2,010,148,423

Inventor(s): GRIFFIN BRENDAN [AU]

Type of Offer: Sale



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