System for analysing plasma
A system 400 for analysing plasma comprises at least one sensor 125 which is co-operable with a plasma generator for sensing a characteristic of plasma generated by the plasma generator and generating an analogue signal representative thereof. The system also includes an analogue-to-digital converter in communication with the sensor for converting the analogue signal to a digital signal which is suitable for digital processing 130. The at least one sensor may be capacitive such as a capacitive clamp 125 to detect electrical noise on a power line, or acoustic such as a microphone 205 to detect sound energy, or image capture means such as a camera to image the plasma. If two or more of the sensor types are used the sensor signals may be cross referenced together to provide an output characteristic of the plasma.
DANIELS STEPHEN [IE]; LAW VICTOR JOHN [IE]
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