Microelectromechanical System Tunable Capacitor
The present invention provides a new type of microelectromechanical capacitor, that allows ' a first selective deflection of a movable capacitance electrode to form an arched shape over a fixed capacitance electrode upon the application of an electrostatic force between the movable capacitance electrode and fixed bias electrodes, and a second deflection of the arched movable capacitance electrode upon the application of a second electrostatic force between the movable capacitance electrode and fixed capacitance electrode; such that said first and second deflections control and/or tune the capacitance of said capacitor. By providing the first and second deflections of the movable capacitance electrode allows that (a) the capacitor is continuously tunable and (b) provides a high accurate tuning range. The first and second deflections are used to modify the capacitance between the movable capacitance electrode and fixed capacitance electrode(s). The tunable capacitor of the present invention can be used to optimise the operation of a radio-frequency circuit at multiple frequencies and power levels.
O'MAHONY CONOR [IE]; HILL MARTIN [IE]
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