Patterning and Contacting of Magnetic Layers
A method according to embodiments of the present invention comprises providing a magnetic stack comprising a magnetic layer sub-stack comprising magnetic layers (41) and a bottom conductive electrode (43) and a top conductive electrode (44) electrically connecting the magnetic layer sub-stack at opposite sides thereof; providing a sacrificial pillar (46) on top of the magnetic stack, the sacrificial pillar (46) having an undercut with respect to an overlying second sacrificial material (45) and a sloped foot with increasing cross-sectional dimension towards the magnetic stack, using the sacrificial pillar for patterning the magnetic stack, depositing an insulating layer (70) around the sacrificial pillar (46), selectively removing the sacrificial pillar, thus creating a contact hole (80) towards the patterned magnetic stack, and filling the contact hole with electrically conductive material (81).
OP DE BEECK MARIA [BE]; LAGAE LIESBET [BE]; CORNELISSEN SVEN [BE]
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