Electrostatically actuatable MEMS device
Electrostatically actuatable MEMS device comprising: a substrate (103) of which at least a top layer (106) comprises a dielectric material; a first conductor (102) fixed to the top layer of the substrate, forming a fixed electrode of the device; and a second conductor (100) fixed to the top layer of the substrate, the second conductor being electrically isolated from the first conductor and comprising a movable portion (100') which is suspended at a predetermined first distance (D1) above the first conductor. The movable portion forms a movable electrode of the device which approaches the fixed electrode upon applying an appropriate voltage difference between the first and second conductors. A substrate surface area (105) is defined as the orthogonal projection of the movable portion on the substrate between the first and second conductors.; In the substrate surface area at least one recess (107) is provided in at least the top layer of the substrate.
DE WOLF INGRID [BE]; ROTTENBERG XAVIER [BE]; CZARNECKI PIOTR [BE]; SOUSSAN PHILIPPE [FR]
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