A Method for Forming a Nanostructure Penetrating a Layer
The device comprises a substrate, a layer present thereon and a nanostructure penetrating said layer, which nanostructure defines a nanoscale passageway through which a molecule to be analyzed can pass through the passageway, wherein the nanostructure has, in cross-sectional view, a substantially triangular shape. This shape is particularly achieved by growth of an epitaxial layer having crystal facets defining tilted sidewalls of the nanostructure. It is highly suitably for use for optical characterisation of molecular structure, particularly with surface plasmon enhanced transmission spectroscopy.
CHENG KAI [BE]; VAN DORPE POL [BE]; LAGAE LIESBET [BE]; BORGHS GUSTAAF [BE]; CHEN CHANG [BE]
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