Stepping Actuator and Method of Fabrication

The current invention provides a stepping actuator, achieving large range up to +-35 mum with low operating voltages of 15V or lower and large output forces of up to +-110 muN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

Attached files:
US 20090019847.jpg

Patents:
US 20,090,019,847

Inventor(s): ERISMIS MEHMET AKIF [BE]; NEVES HERCULES PEREIRA [BE]; VAN HOOF CHRIS [BE]; PUERS ROBERT [BE]

Type of Offer: Sale



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