Oscillator Circuit for Generating an Alternating Voltage
Oscillator circuit for generating an alternating voltage (VAC), comprising an oscillator according to a micro-electromechanical system (MEMS-oscillator) to be manufactured as integrated circuit and comprising at least a substrate on which are arranged - a first strip of a thin film of an electrically conductive material extending parallel to the substrate and spatially separated therefrom, - a first electrode, - a second electrode separated spatially from the first strip for supplying a direct voltage (VDC) thereon via an impedance, - wherein a direct voltage (VDC) supplied on the second electrode via the impedance generates an alternating voltage (VAC) over the first and the second electrode.
VAN SPENGEN WILLEM MERLIJN [NL]; OOSTERKAMP TJERK HENDRIK [NL]
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