Device and Method for Angularly Resolved Scattered Light Measurement

The invention relates to a device for angularly resolved scattered light measurement, comprising an illuminating device having a light source (1) for illuminating a sample (6) with light at a non-vanishing angle of incidence (? i) and a detector (7) for registering a proportion of the light scattered at the sample, an evaluation unit (13) for evaluating output signals from the detector, and an absorber (8). The illuminating device includes a first converging lens system (2) and a second converging lens system (5) and also an aperture stop (3) arranged between the two lens systems (2, 5), which are arranged in such a way that the light originating from the light source (1) is focused onto the aperture stop (3) through the first converging lens system (2), and a proportion of the light originating from the aperture stop (3), reflected specularly by the sample (6) or transmitted un-scattered through the sample (6) and passing through the second converging lens system (5), can be focused onto the detector (7). The detector (7) includes a CMOS sensor matrix and the absorber (8) is arranged in such a way that a proportion of the light reflected by the detector (7), reflected specularly by the sample (6) or transmitted un-scattered through the sample (6) and focused onto the detector, strikes the absorber (8). The invention further relates to a corresponding method for angularly resolved scattered light measurement.

Attached files:


Patents:
WO 2,010,127,872

Inventor(s): SCHROEDER SVEN [DE]; DUPARRE ANGELA [DE]; HERFFURTH TOBIAS [DE]; NOTNI GUNTHER [DE]

Type of Offer: Sale



« More Optical Science Patents

---