Method for improving positioning accuracy of table, involves guiding-away gas from direct surrounding of gas bearing elements over selective influence of flow conditions in area surrounding sliding su
The method involves generating bearing force of gas bearing elements (1) through supplying of compressed gas for formation of a pressurized cushion between a sliding surface (4) and a counter surface (7). The gas is guided-away from the direct surrounding of the bearing elements over selective influence of flow conditions in an area surrounding the sliding surface. A sealing system comprising a channel (9) and a sealing surface (10) is arranged around the sliding surface, where the sealing surface is connected to the channel.
SCHENK CHRISTOPH [DE]; RISSE STEFAN [DE]
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