Shear Sensors and Uses Thereof

The present invention relates to shear sensors. In particular, the present invention relates to deformable sensors for measurement of shear forces during chemical mechanical polishing.

Attached files:
US 20110132871.jpg

Patents:
US 20,110,132,871

Inventor(s): WHITE ROBERT D [US]; MUELLER ANDREW [US]; ROGERS CHRISTOPHER [US]; MANNO VINCENT [US]; STONE HOWARD [US]; GAUTHIER DOUGLAS A [US

Type of Offer: Licensing



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