Shear Sensors and Uses Thereof
The present invention relates to shear sensors. In particular, the present invention relates to deformable sensors for measurement of shear forces during chemical mechanical polishing.
Attached files:Patents:US 20,110,132,871
Inventor(s):
WHITE ROBERT D [US]; MUELLER ANDREW [US]; ROGERS CHRISTOPHER [US]; MANNO VINCENT [US]; STONE HOWARD [US]; GAUTHIER DOUGLAS A [US
Type of Offer:
Licensing
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