Mems Microphone Array on a Chip
The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.
Attached files:Patents:WO 2,009,154,981
Inventor(s):
WHITE ROBERT D [US]; KRAUSE JOSHUA S [US]
Type of Offer:
Licensing
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