Nano-microphone Or Pressure Sensor
The invention relates to a method and a device for measuring or detecting and/or generating of pressures or pressure changes, in particular acoustic vibration and a method for production of such a device. The invention particularly relates to a nano-microphone. The device comprises at least one nano-membrane with a support membrane and at least one counter-electrode, the support membrane having at least one monolayer.
GOELZHAEUSER ARMIN [DE]
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