Optical Fiber Pressure Sensor with Uniform Diaphragm and Method of Fabricating Same

An optical fiber sensor (100) can be used to measure pressure with high sensitivity and fine resolution. As a cavity (108) at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm (110) to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not suffer from temperature- induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.

Attached files:


Patents:
WO 2,011,008,559

Inventor(s): WANG WENHUI [US]; WANG XINGWEI VIVIAN [US]; SUN KAI [US]; WU NAN [US]

Type of Offer: Licensing



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