Methods for Forming Metal-polymer Hybrid Tooling for Forming Parts Having Micro Features

A method for forming metal-polymer hybrid tooling includes patterning a surface of a member such as a silicon wafer, stainless steel, nickel or nickel alloy, engaging a polymer layer with the patterned features of the surface of the silicon wafer to form the polymer layer having a reverse of the patterned surface the silicon wafer, removing the patterned polymer layer to expose a patterned polymer layer surface, depositing a metallic layer on the patterned polymer layer surface, and wherein the deposited metallic layer on the patterned polymer layer is operable to form parts with features having a width dimension between about 0.01 microns and about 100 microns and a height dimension of between about 0.01 micron and about 800 microns (e.g., up to aspect ratio of 8).

Patents:
US 20,110,123,711

Inventor(s): YOON SUNG-HWAN [US]; BARRY CAROL M F [US]; MEAD JOEY L [US]; CHA NAM-GOO [US]; BUSNAINA AHMED A [US]

Type of Offer: Licensing



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