Nanostructure production method in substrate used in microelectromechanical system (MEMS) or microchips, involves making drops of solution for nanostructure formation float on substrate, and heating s
The method involves adding drops of solution for nanostructure formation in water at a temperature above a predetermined temperature, in which the drops of solution floats to a substrate on a steam pad. The steam pad heats the substrate to evaporate the added drops, leaving and forming nanostructures on the substrate. The temperature of the substrate is set above 200 degrees Celsius, and is tilted before or immediately after dropping the solution. The substrate is heated in several minutes or few hours for continuous growth of nanostructures.
ELBAHRI MADY [DE]; ADELUNG RAINER [DE]; PARETKAR DADICHI [IN]
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