Enhanced Detection Sensitivity with Piezoelectric Microcantilever Sensors
A method for enhancing the detection sensitivity of a piezoelectric microcantilever sensor. The method may involve providing a piezoelectric microcantilever and inducing a change in the Young's modulus during detection of a species of interest. The change in the Young's modulus may be induced or enhanced by the application of a DC bias electric field to the piezoelectric layer that enhances non-180 DEG polarization domain switching of the piezoelectric layer. The change in the Young's modulus may also result from binding of the species of interest to the piezelectric microcantilever sensor or a combination of binding and application of a DC bias electric field. Significantly enhanced detection sensitity results from the changed Young's modulus of the piezoelectric layer.
SHIH WAN Y [US]; SHIH WEI-HENG [US]; ZHU QING [US]
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