Ion Deflector for Two-dimensional Control of Ion Beam Cross Sectional Spread
An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.
KRECKEL HOLGER [DE]; BRUHNS HJALMAR [DE]; SAVIN DANIEL WOLF [US]
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