Laser-irradiated Thin Films Having Variable Thickness

A crystalline film includes a first crystalline region having a first film thickness and a first crystalline grain structure; and a second crystalline region having a second film thickness and a second crystalline grain structure. The first film thickness is greater than the second film thickness and the first and second film thicknesses are selected to provide a crystalline region having the degree and orientation of crystallization that is desired for a device component.

Attached files:
US 20100187529.jpg

US 20,100,187,529

Inventor(s): IM JAMES [US]

Type of Offer: Licensing

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