Thin-layer thermocouple arrangement useful in thermo-generator to generate electrical energy from thermal energy, comprises thermocouple arranged on base layer with connection point and measuring poin
The thin-layer thermocouple arrangement useful in a thermo-generator for generating electrical energy from thermal energy, comprises a thermocouple arranged on a base layer (1) with a connection point (3) and a measuring point (4) for generating an electrical voltage at the connection point with a temperature difference between the connection point and measuring point, a passivation layer on a top side, a substrate arranged below the base layer in partial regions, and a silicon oxide layer arranged between the substrate and the base layer and having a thickness of 500 nm.
BUCHNER RAINER [DE]; LANG WALTER [DE]
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