Microcavity Plasma Devices with Non-uniform Cross-section Microcavities
An embodiment of the invention is an array of microcavity plasma devices having microcavities of non-uniform cross-section. The array includes a first electrode that is a thin metal foil or film including a plurality of non-uniform cross-section microcavities therein that are encapsulated in oxide. The invention provides for a continuous range of microcavity wall profiles to be fabricated, ranging from a linear taper to parabolic (bowl-shaped) cavities. A second electrode is a thin metal foil encapsulated in oxide that is bonded to the first electrode, the oxide preventing contact between the first and second electrodes. A packaging layer contains gas or vapor in the non-uniform cross- section microcavities. A method for forming an array of microcavity plasma devices begins with pre-anodizing a metal foil or thin film.; Photoresist is patterned onto the anodized metal foil or film to encapsulate the anodized foil or film except on a top surface at desired positions of microcavities. A second anodization or electrochemical etching is conducted to form the non-uniform cross-section sidewall microcavities cavities. After removing photoresist and metal oxide, a final anodization lines the walls of the microcavities with metal oxide and fully encapsulates the metal electrodes with metal oxide.
EDEN J GARY [US]; PARK SUNG-JIN [US]; SOO KWANG [US]; PRICE ANDREW J [US]
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