Ellipsoidal Microcavity Plasma Devices and Powder Blasting Formation

Microcavity plasma devices and arrays are formed in layers that also seal the plasma medium, i e, gas(es) and/or vapors A microcavity plasma device includes first and second thin layers that are joined together A half ellipsoid microcavity or plurality of half ellipsoid microcavities is defined in one or both of the first and second thin layers, and electrodes are arranged with respect to the microcavity to excite a plasma within said microcavities upon application of a predetermined voltage to the electrodes A method for forming a microcavity plasma is also provided by a preferred embodiment The method includes defining a pattern of protective polymer on the first thin layer Powder blasting forms half ellipsoid microcavities in the first thin layer The second thin layer is joined to the first layer The patterning can be conducted lithographically or can be conduced with a simple screen

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Patents:
WO 2,010,044,992

Inventor(s): EDEN J GARY [US]; PARK SUNG-JIN [US]; SUNG SEUNG HOON [US]

Type of Offer: Licensing



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