Microcavity and Microchannel Plasma Device Arrays in a Single, Unitary Sheet
An array of microcavity plasma devices is formed in a unitary sheet of oxide with embedded microcavities or microchannels and embedded metal driving electrodes isolated by oxide from the microcavities or microchannels and arranged so as to generate sustain a plasma in the embedded microcavities or microchannels upon application of time-varying voltage when a plasma medium is contained in the microcavities or microchannels.
EDEN J GARY [US]; PARK SUNG-JIN [US]; KIM KWANG-SOO [US]; KIM TAEKLIM [US]
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