System and Methods of Laser Assisted Field Induced Oxide Nanopatterning

A method of forming a nanoscale pattern on a substrate surface. In one embodiment, the method includes the steps of providing a substrate having a surface; providing a nanoscale pattern forming device, comprising an elongated cantilever that has a tip portion proximate an end of the elongated cantilever; and controllably illuminating at least the tip portion of the cantilever with a beam of substantially coherent monoenergetic particles when the cantilever moves relative to the substrate to form a nanoscale pattern on the surface, wherein the tip portion of the cantilever is made from lightly doped silicon.

Attached files:
US 20090085258.jpg

Patents:
US 20,090,085,258

Inventor(s): HERSAM MARK C [US]; PINGREE LIAM S C [US]

Type of Offer: Licensing



Next Patent »
« More Nanotech Patents

Share on      


CrowdSell Your Patent