Reinforced Piezoresistive Pressure Sensor

A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a multiple diaphragm piezoresistive pressure sensor for measuring the pressure of a liquid, comprising an inner deformable diaphragm formed on a silicon substrate, the inner deformable diaphragm having a first thickness an outer deformable diaphragm formed on the silicon substrate, the outer deformable diaphragm having a second thickness which is greater than the first thickness, positioned below the inner deformable diaphragm to support the inner deformable diaphragm, a first piezoresistive bridge embedded in the inner deformable diaphragm, a second piezoresistive bridge embedded in the outer deformable diaphragm and possibly a third piezoresistive bridge embedded in the silicon substrate to compensate for temperature variations.

Attached files:
US 7856885.jpg

Patents:
US 7,856,885 issued 2010-12-28   [MORE INFO]

Inventor(s): BHANSALI SHEKHAR [US]; LANGEBRAKE LAWRENCE C [US]

Type of Offer: Licensing



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