Multilayer circuit, particularly three-dimensional ceramic substrate system, is made of sintered ceramic material, where active electronic component is arranged in cavity
The multilayer circuit, particularly three-dimensional ceramic substrate system, is made of a sintered ceramic material. An active electronic component of a micro-system technology or Microelectromechanical systemor microelectronic is made of semiconducting material. The active electronic component is arranged in a cavity if the temperature stability of the semiconducting material and all other materials is correspondent to the sintering temperature of the ceramic substrate system. An independent claim is also included for a method for manufacturing a multilayer circuit.
KUSTERER JOACHIM [DE]; KOHN ERHARD [DE]; MAIER DAVID [DE]
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