Methods, Systems and Computer Program Products for Characterizing Structures Based on Interferometric Phase Data

Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.

Attached files:


Patents:
US 20,100,201,991

Inventor(s): CHOMA MICHAEL [US]; IZATT JOSEPH A [US]; ELLERBEE AUDREY [US]; SARUNIC MARINKO [US]

Type of Offer: Licensing



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