Micro-electro-mechanical systems (MEMS) capacitive sensing circuit
The present invention discloses a Micro-Electro-Mechanical Systems (MEMS) capacitive sensing circuit wherein two input nodes of a fully differential amplifier are separately connected to a MEMS capacitive sensing device and a matching capacitor, which both contain similar capacity value and connect to a bias node, and two resistors separately connect the MEMS capacitive sensing device and the matching capacitor to ground (zero voltage). Thus, the present invention could effectively eliminate the bias noise in the circuit without any discrete capacitor and capable for designer to integrate all circuit devices into an IC.
US 8,023,667 issued 2011-09-20 [MORE INFO
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