Apparatus and Method for Measuring the Thickness of a Semiconductor Wafer

Apparatus for measuring thicknesses of semiconductor wafers, comprising: housing means for supporting a wafer in a light-tight environment; a light source mounted to the housing at one side of the wafer to emit light of a predetermined wavelength to normally impinge the wafer; a light detector supported at a predetermined distance from a side of the wafer opposite the side on which a light source impinges and adapted to receive light transmitted through the wafer; and means for measuring the transmitted light.

US 5,396,332   [MORE INFO]

Inventor(s): Theodore F. Ciszek

Type of Offer: Licensing

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