Method and Apparatus for Fabricating a Thin-Film Solar Cell Utilizing a Hot Wire Chemical Vapor Deposition Technique

A thin-film solar cell is provided. The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten (10) .ANG./second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a thin film solar cell is also provided. The method comprises depositing a n-i-p layer at a deposition rate of at least ten (10) .ANG./second for the a-SiGe:H intrinsic layer.

Patents:
US 7,122,736   [MORE INFO]

Inventor(s): Qi Wang; Eugene Iwancizko

Type of Offer: Licensing



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