Method and Apparatus for Measuring Spatial Uniformity of Radiation
A method and apparatus for measuring the spatial uniformity of the intensity of a radiation beam from a radiation source based on a single sampling time and/or a single pulse of radiation. The measuring apparatus includes a plurality of radiation detectors positioned on planar mounting plate to form a radiation receiving area that has a shape and size approximating the size and shape of the cross section of the radiation beam. The detectors concurrently receive portions of the radiation beam and transmit electrical signals representative of the intensity of impinging radiation to a signal processor circuit connected to each of the detectors and adapted to concurrently receive the electrical signals from the detectors and process with a central processing unit (CPU) the signals to determine intensities of the radiation impinging at each detector location. The CPU displays the determined intensities and relative intensity values corresponding to each detector location to an operator of the measuring apparatus on an included data display device. Concurrent sampling of each detector is achieved by connecting to each detector a sample and hold circuit that is configured to track the signal and store it upon receipt of a "capture" signal. A switching device then selectively retrieves the signals and transmits the signals to the CPU through a single analog to digital (A/D) converter. The "capture" signal. is then removed from the sample-and-hold circuits. Alternatively, concurrent sampling is achieved by providing an A/D converter for each detector, each of which transmits a corresponding digital signal to the CPU. The sampling or reading of the detector signals can be controlled by the CPU or level-detection and timing circuit.
US 6,441,896 [MORE INFO
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