Method for Improving the Stability of Amorphous Silicon

A method of producing a metastable degradation resistant amorphous hydrogenated silicon film is provided, which comprises the steps of growing a hydrogenated amorphous silicon film, the film having an exposed surface, illuminating the surface using an essentially blue or ultraviolet light to form high densities of a light induced defect near the surface, and etching the surface to remove the defect.

US 6,713,400   [MORE INFO]

Inventor(s): Howard M. Branz

Type of Offer: Licensing

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