A Real-Time Parylene-Thickness Monitoring Optical Sensor System (GSC-14757)

Abstract:
The invention is an optical film-thickness sensor for use in Parylene deposition systems, to accurately measure the deposited film thickness in real time. The sensor would be secured to the coating chamber feed-through. The face of the sensor will have cleaved embedded optical fibers, onto which the Parylene film will deposit. The light is split through a 2x2 coupler, with 1 leg forming the sensor, and the other leg being directly coupled to a photodetector. The formed fiber/Parylene, Parylene/Air interface will create a reflected signal back through the fiber, which will change as the film thickness increases. The return signal and directly terminated signal will be multiplexed, resulting in interference fringes. These friges are to be interrogated to extract the film thickness through basic Fabry-Perot Interferometer principles. Multiple fibers will be used in the sensor (2) in order to increase the gain of the overall sensor while minimizing the power requirements of the light source, and to increase the overall accuracy and redundancy of the sensor.

Type of Offer: Licensing



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