Method and Device for the Production of a Grid with Chirp
The present invention relates to a method for the production of a grid with chirp, wherein a grid structure is inscribed in a carrier in that the carrier is exposed in a diffraction field of a diffraction grid (3), wherein the diffraction grid (3) is deformed into a state with a local and/or time-dependant relative change in length for the exposure of the carrier. The invention further relates to a corresponding device for the production of a grid with chirp.
Attached files:Patents:WO 2,009,015,906 [
MORE INFO]
Type of Offer:
Sale
« More Engineering - Industrial Patents« More Microscopy Patents