Highly sensitive hydrogen sensor for detecting fires/combustion has a thin-layer structure made from a semiconductor substrate, an insulator, fluoride ion conductors and electrodes
An insulator layer (3) attaches to a semiconductor substrate (2). A fluoride ion conductor layer is applied to the insulator layer and a palladium layer/electrode (5) to the fluoride ion conductor layer (4). A second electrode (6) fits on the rear side of the semiconductor substrate. Independent claims are included for: (A) a hydrogen gas alarm with a hydrogen sensor; (B) and for a hydrogen gas detector with a hydrogen sensor; (C) and for a method for determining hydrogen gas concentration.
Attached files:Patents:DE 102,004,033,597
Inventor(s):
MORITZ WERNER [DE]; SZEPONIK JAN [DE]
Type of Offer:
Sale
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