Synthesis of High Density Uniform Well-Aligned Carbon Nanotubes
This invention describes a novel way to make well-aligned carbon nanotubes on a variety of substrates such as Ni,Fe,Co, etc. - coated Si or glass at temperatures below 666 degrees C.
Good alignment is very important not only for fundamental rese arch but also for applications such as flat panel displays. Well-aligned carbon nanotubes are accomplished by plasma enhanced chemical vapor deposition (PE-CVD) in a glass mixture of acetylene and ammonia. Acetylene provides the carbon for nanotube s and ammonia acts as dilution gas and catalyst. The ratio of acetylene to ammonia and their flow rate determine the growth rate and diameters and provide uniform distribution of nanotubes on the coated substrates. The thickness of the metallic coa ting (Ni, Fe, Co, etc.) on Si or glass has been found to be another factor controlling nanotube quality. The nanotubes have diameters ranging from 10 to 200 nm and are distributed uniformly with an emission density 100 to 10,000 times higher than cu rrent technology.
The greatest advantage of the technology is that the growth temperature is below 666 degrees Celsius which is the strain point of the display glass produced by Corning Inc. This low processing temperature makes it possible to synthesize well-aligned carbon nanotubes on display glass for flat panel displays.
Categories: Nanotechnology Patents Issues: 6,863,942
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