Tactile Sensor

PROBLEM TO BE SOLVED: To provide a tactile sensor capable of preventing damage on a sensor section with more certainty, even if an elastic body is greatly deformed. ; SOLUTION: The tactile sensor 1 includes the elastic body 2 and a plurality of sensor units 3 embedded in the elastic body 2. Each sensor unit 3 comprises a sensor section 4 and a protective film 5 covering the sensor section 4. The protective film 5 is formed with about 1 [mu]m-thick polyparaxylene (coating film material), using CVD (Chemical Vapor Deposition), providing an internal space 17 around the sensor section 4. The internal space 17 is filled with a fluid 18, such as silicon oil, having a predetermined viscosity. ; COPYRIGHT: (C)2010,JPO&INPIT

Attached files:


Patents:
JP 2,010,169,597

Inventor(s): SHIMOYAMA ISAO; MATSUMOTO KIYOSHI; NODA KENTARO

Type of Offer: Sale



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