Integrated Mems and Ic Systems and Related Methods
An integrated MEMS and IC system (MEMSIC), as well as related methods, are described herein. According to some embodiments, a mechanical resonating structure is coupled to an electrical circuit (e.g., field-effect transistor). For example, the mechanical resonating structure may be coupled to a gate of a transistor. In some cases, the mechanical resonating structure and electrical circuit may be fabricated on the same substrate (e.g., Silicon (Si) and/or Silicon-on-Insulator (SOW and may be proximate to one another.
WENZLER JOSEF-STEFAN [US]; DUNN TYLER [US]; ERRAMILLI SHYAMSUNDER [US]; MOHANTY PRITIRAJ [US]
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