Method and Apparatus for Depositing Material Using a Dynamic Pressure

A method of depositing organic material is provided. A carrier gas carrying organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas.

Attached files:


Patents:
US 20,110,045,196

Inventor(s): FORREST STEPHEN R [US]; SHTEIN MAX [US]

Type of Offer: Licensing



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