Organic Vapor Jet Deposition Using an Exhaust

Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. One or more carrier gases may be provided and ejected from a plurality of nozzles. An exhaust may be provided to create a localized vacuum between nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.

Attached files:
US 7879401.jpg

Patents:
US 7,879,401

Inventor(s): FORREST STEPHEN [US]; LUNT RICHARD [US]

Type of Offer: Licensing



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