Lead-free Piezoelectric Ceramic Films and a Method for Making Thereof
his invention relates to lead-free piezoelectric ceramic films and a method of making thereof. Specifically, the invention is directed to a method for fabricating lead-free piezoelectric free standing films having enhanced piezoelectric properties. The films may be used for a number of applications including incorporation in microelectronic devices such as energy harvesting devices and sesor technologies.
SHIH WEI-HENG [US]; SHIH WAN Y [US]; LI HUIDONG [US]
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