Design and Fabrication of High Performance AFM Cantilivers

High performance cantilevers with optimal combinations of high resonant frequency and low force constant are provided. AFM cantilevers with spring constants in the range 1-10-6 N/m with fundamental resonant frequencies in aqueous solutions of 0.1-100 MHz are provided. The high performance cantilevers allow faster scanning, increase the temporal resolution of force measurement, improve measurement sensitivity by reducing cantilever noise, and improve sensitivity by reducing cantilever spring constant.

Patent (Set) U.S. Patent 7,441,444

US 7,441,444

Inventor(s): Hoh, Jan

Type of Offer: Licensing

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