Dielectric Sensor
It is very important to accurately measure the thickness of thin layered films, which are used in many scientific fields. There are several techniques available for non-invasive estimation of film thickness. However most of them are limited to certain type of films, or may not be suitable for making in-situ measurements in real-time. This technology describes a novel method for thickness measurements based on admittance measurements of microdielectric Fringe-Effect (FE) sensors. The technique allows for simultaneous measurements of film thickness and dielectric properties - the film�s dielectric permittivity as a function of the distance can be measured. The invention allows for the real-time, in-situ measurements of surfaces with complex geometry and substrates in confined and inaccessible locations.Benefits
The technology has a broad range of applications and can be applied to any scientific field that requires thickness measurements. Some potential applications include the oil industry - for measuring wax deposits on crude-oil pipelines, biomedical device industry - for measuring biofilm growth on implanted devices, electronic, optoelectronic, and semiconductor industry - for controlling vacuum deposition and etching in micro fabrication processes. Degradation of protective layers (coatings, paint, etc.) can also be monitored using this technology.
Stage of Development
A provisional application has been filed on this technology. This technology is part of an active and ongoing research program and has been demonstrated to work in proof-of-concept experiments. It is available for licensing under either exclusive or non-exclusive terms.
Additional Info
*Y-H. Choi and M. Skliar, "Quantitative Measurements of Dielectric Spectra with Microdielectric Fringe-Effect Sensors," Analytical Chemistry, 76:4143-4149, 2004.
*Y-H. Choi and M. Skliar, "Standard-Independent Estimation of Dielectric Permittivity with Microdielectric Fringe-Effect Sensors," Analytical Chemistry, 77:871-877, 2005.
Inventor(s): Mikhail Skliar
Type of Offer: Licensing
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