Generating gas discharge for sputter process - extending electron paths using permanent magnet set into cylindrical cathode to generate field cutting field lines of anode
The method involves using a magnetic cylindrical cathode (1) with an aperture (4) which is axially aligned with the anode (2). Within the cylindrical cathode body is a permanent magnet (5), again axially aligned and fixed to the end wall. The geometry is selected such that the permanent magnet field lines emanate radially and cut the field lines from the anode entering the chamber. ADVANTAGE - Stable discharge conditions with low gas pressure, e.g. under 5 Pa.
KERKOW HARTMUT DR RER NAT [DE]; BOUBETRA DJAMEL DIPL ING [DE]; HOLLDACK KARSTEN DR RER NAT [DE]; FAHNAUER STEFFEN [DE]
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