Measurement system having a detector array for detecting interference fringes

The invention relates to the measurement of physical properties including spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of light (i.e. wavelength). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. The invention provides means to form an interference pattern having maxima and minima. Part of the interference pattern, including more than one fringe, is captured at a detector array and the captured pattern compared with a calculated pattern. Precise measurement of the spacing between the maxima is possible, thus allowing precise measurements of position of the detector in the interference pattern.

Attached files:


Patents:
GB 2,463,967

Inventor(s): WEAVER JONATHAN MARK RALPH [GB]; DOBSON PHILLIP STEPHEN [GB]; BURT DAVID PAUL [GB]; THOMS STEPHEN [GB]; DOCHERTY KEVIN EDWARD [G

Type of Offer: Sale



« More Optical Science Patents

---